• Prof. Bashir Nour Kharrat
• Dec 31, 2009

Studying Mathematical model of Boundary Value problem to perturbed vibrations of silicon diaphragm in Mems capacitive Microphone

The traditional perturbation methods depend on a “small parameter” which is difficult to be determined for some real-applications .To overcome address this shortcoming, A new powerful semi-analytical method the Adomian decomposition method (ADM) is introduced to approximate the deflection of polysilicon diaphragm with small flexural rigidity of Micro Electro Mechanical System (MEMS) capacitive microphone. Using the theory of semigroup we prove the existence and the uniqueness of the solution of considered problem. Also, special attention to prove the convergence of the proposed method is given. Some numerical simulation and comparisons between the approximate solutions obtained by the application of the ADM with that obtained by the VIM are made to confirm the reliability and the accuracy of the applied method. The approximations obtained by ADM are uniformly valid not only for small parameters, but also for very large parameters.

app.published_in

• R.J.of Aleppo University, Basic ScienceSeries No.74 - 2009